UPW/DI System
UPW/DI System

UPW/DI System is a system that removes particulates, organic matter, bacteria, and minerals from raw water (municipal water, industrial water) and treats the resistivity value to the level of theoretical pure water (18.25㏁.㎝).
Applications
It is applied to semiconductors, display cleaning, chemical and drug manufacturing industries, laboratory water, etc.
UPW Production Process
A UPW system consists of a pre-treatment process, a make-up process, and a polishing process to produce and deliver UPW.
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01RAW WATER
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02PRE-TREATMENT
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03MAKE-UP
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04POLISHING
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05USE POINT
Pre-Treated System
The process of removing suspended solids (SS), residual chlorine, CO2, etc. from raw water (municipal, industrial) using filtration and adsorption principles.
- Suspended Solids Removal Equipment: Strainers, Activated Carbon Towers, Microfilters
- CO2 removal equipment: Degassing towers
Make-up System
It is a primary water purification system that uses reverse osmosis and chemical substitution to remove ionic substances in water and partial pressure to remove gas components (DO, CO2).
- Ionic Removal Equipment: Reverse Osmosis (RO), Ion Exchange Resin, CEDI
- Gas component removal equipment : Membrane degassing (MDG), Degassing tower (VDG)
Polishing System
This is a secondary purification process that removes residual ionic substances that were not removed in the primary purification and removes live bacteria/particulates in the water to produce ultrapure water that is close to theoretical purity (18.2㏁.cm).
- Ionic Material Removal Equipment : Ion Exchange Resins
- Organic matter/bacteria removal equipment : UV equipment
- Particulate removal equipment : Ultra Filter(UF), Final Filter equipment